Accueil>Membres>UCL - ICTEAM / Sensors, Microsystems and Actuators Laboratory of Louvain (SMALL)

UCL - ICTEAM / Sensors, Microsystems and Actuators Laboratory of Louvain (SMALL)

Produits / Services / Activités

Type de membre

  • Acteur R&D

Présentation générale

Bulk and surface micromachining sensors for chemical, medical and harsh environments applications. The group members are focused on varied devices design and fabrication of MEMS and NEMS structures co-integrated with SOI CMOS circuits: design and fabrication of NEMS-based lab-on-chip to characterize the electromechanical properties of materials at nanometer scale, nanowires gas sensors, nanoporous silicon membranes, magnetometers, flow, humidity, pressure and inertial sensors, surface acoustic wave device, etc.

Coordonnées

Etablissement public
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1348 Louvain-la-Neuve, Belgique
+32 10 47 81 35
BE 0419.052.272

Contact

Flandre Denis
Professeur
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